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Wake Forest University
Center for Nanotechnology and Quantum Materials
JEOL 6340F SEM
In-lens secondary electron detector
Resolution: 2.5nm at 1kV 1.2nm at 20kV
Sample size: 4" X-Direction: 50 mm Y-Direction: 70 mm
Chamber: Airlock, 4" LN2 cold trap
EDX Capabilities Chamber camera & monitor X-Stream imaging system
Operating system: Windows XP Image capture & networking capability.
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